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The normal energy on the NIR laser nonetheless has the likely to become enhanced to tens of watts for instance 70 W [26] In case the double-pass configuration could be used to the Yb:YAG SCF amplifier stage. For this reason, If your conversion effectiveness of 31% from NIR to DUV might be even now taken care of at this higher ability affliction, the common output energy in the DUV laser at 258 nm may very well be in excess of twenty W, which would be described as a extraordinary electrical power stage for the DUV laser and cause the unanticipated DUV laser machining effects. Additionally, for high-electric power DUV laser, the UV harm in the nonlinear crystal, including the windows for CLBO crystal as well as the mirrors, is an additional vital parameter for long term and stable operation.
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On the opposite aspect, the ability scaling in the NIR laser is another element to increase the average power of your 193-nm DUV laser. Due to the deficiency of the higher-ability amplification Resolution in the NIR laser (for instance at 1553 nm), nonlinear frequency procedures such as optical parameter oscillation (OPO) may very well be applied to make a wavelength converter by shifting the wavelength from one μm to the specified wavelength along with getting relative higher energy [21]. Not long ago, a diamond Raman laser confirmed its ability in achieving a superior electrical power in addition to a higher conversion effectiveness with the 1st Stokes of your one-μm laser [22,23], which means the possibility to become applied inside the 193-nm DUV laser generation because of its high Raman obtain and large frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics from the Nd:YAG fundamental laser wavelength. As a way to boost the hurt threshold, lower CLBO surface area roughness, by ultra-precision machining, is required. Because the click here CLBO crystal has quick hydroscopic response and micro scratches in machining, ultra-specific machining in the CLBO crystal is actually a difficult technological difficulty.
Tunable ultraviolet laser resource based on strong-state dye laser know-how and CsLiB6O10 harmonic generation
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The development of your 193-nm laser was demonstrated by phases of SFG. To be able to scale the DUV laser ability proficiently, a brand new principle of the 193-nm DUV laser era is offered based on the diamond Raman laser.